Perfmon is not working on the following devices
4507 - Version 03.04.05.SG
4500x - Version 03.04.05.SG
3850 - Version 03.03.01SE
6509 - Version 15.1(2)SY4a
I checked the list of supported device and found that it should work on 6509 as per below link:
Cisco Path Trace Application for APIC-EM Supported Platforms, Release 1.4.0.x - Cisco