First, make sure you are complying with the below guidelines:
https://supportforums.cisco.com/docs/DOC-9132
Then, try these steps:
1. In Windows, go to Start and click on 'Run...'. Type in services.msc and set the following CiscoWorks Services to Startup Manual:
-CiscoWorks Daemon Manager
-CSCS rsh/rcp service
-CSCS syslog service
-CSCS tftp service
2. Reboot the server.
3. Try your install again.
4. When the installation is complete, restore the startup of the following services to Automatic:
-CiscoWorks Daemon Manager.
-CSCS rsh/rcp service
-CSCS syslog service
-CSCS tftp service